Inventor
KOWAKA MASAHIKO
JP17 patents
⚠️ This page may combine multiple inventors who share the name “KOWAKA MASAHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOMATSU MFG CO LTD
13 patentsUS5142543AAug 25, 1992
Method and system for controlling narrow-band oscillation excimer laser
KOMATSU MFG CO LTD130 citations98
US5450436ASep 12, 1995
Laser gas replenishing apparatus and method in excimer laser system
KOMATSU MFG CO LTD123 citations97
US5802094ASep 1, 1998
Narrow band excimer laser
KOMATSU MFG CO LTD61 citations96
US5596596AJan 21, 1997
Narrow band excimer laser
KOMATSU MFG CO LTD71 citations96
US5404366AApr 4, 1995
Narrow band excimer laser and wavelength detecting apparatus
KOMATSU MFG CO LTD94 citations96
US5081635AJan 14, 1992
Apparatus for controlling output from an excimer laser device
KOMATSU MFG CO LTD82 citations96
US4975919ADec 4, 1990
Laser wavelength control apparatus
KOMATSU MFG CO LTD90 citations96
US5373515ADec 13, 1994
Laser wavelength controlling apparatus
KOMATSU MFG CO LTD114 citations94
US4926428AMay 15, 1990
Method and apparatus for sensing the wavelength of a laser beam
KOMATSU MFG CO LTD55 citations94
US4856018AAug 8, 1989
Light source for reduced projection
KOMATSU MFG CO LTD68 citations94
US4829536AMay 9, 1989
Multi-mode narrow-band oscillation excimer laser
KOMATSU MFG CO LTD83 citations94
US5218421AJun 8, 1993
Wavelength detecting apparatus
KOMATSU MFG CO LTD24 citations92
US5198872AMar 30, 1993
Apparatus for detecting the wavelength of laser light
KOMATSU MFG CO LTD29 citations92