Inventor

YU CHRIS C

US44 patents

⚠️ This page may combine multiple inventors who share the name “YU CHRIS C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YU CHRIS C

MICRON TECHNOLOGY INC

Multiple step method of chemical-mechanical polishing which minimizes dishing

Slurries for chemical mechanically polishing copper containing metal layers

Integrated circuit polishing method

Two-step chemical mechanical polishing process for producing flush and protruding tungsten plugs

Chemical mechanical planarization (CMP) of a semiconductor wafer using acoustical waves for in-situ end point detection

Spacers for field emission display fabricated via self-aligned high energy ablation

Method of chemical mechanical polishing predominantly copper containing metal layers in semiconductor processing

Acoustical method and system for detecting and controlling chemical-mechanical polishing (CMP) depths into layers of conductors, semiconductors, and dielectric materials

Method of chemical mechanical polishing aluminum containing metal layers and slurry for chemical mechanical polishing

Process for depositing aluminum nitride (AlN) using nitrogen plasma sputtering

Selective electro-deposition and circuit patterning technique

Two-step chemical mechanical polishing process for producing flush and protruding tungsten plugs

MOTOROLA INC

Polishing pads used to chemical-mechanical polish a semiconductor substrate

Chemical-mechanical-polishing pad cleaning process for use during the fabrication of semiconductor devices

Acoustically regulated polishing process

Process for polishing a semiconductor substrate

Method of polishing a semiconductor substrate

Polishing pad for chemical-mechanical polishing of a semiconductor substrate

Polishing pad for chemical-mechanical polishing of a semiconductor substrate

Method for chemical mechanical polishing a semiconductor device using slurry

YU CHRIS C

Apparatus for disease detection

Apparatus for disease detection

Devices for detecting or filtering tumor cells

Apparatus for detecting tumor cells

Decomposable apparatus and methods for fabricating same

Method of drug delivery

Medical instruments and methods for fabricating same

ANPAC BIO MEDICAL SCIENCE CO LTD

Apparatus for detecting tumor cells

Devices for detecting or filtering tumor cells

Apparatus for detecting tumor cells

Apparatus for disease detection

Apparatus for disease detection

SEMICONDUCTOR MFG INT SHANGHAI

Etch back with aluminum CMP for LCOS devices

Method and structure for aluminum chemical mechanical polishing and protective layer

Method and structure for aluminum chemical mechanical polishing

Method and structure for landing polysilicon contact

CABOT MICROELECTRONICS CORP

Global planarization method

Process for fabricating optical switches

SHANGHAI XINSHENPAI TECH CO LTD

Devices for detecting or filtering tumor cells

Micro-devices for improved disease detection

MICRON SEMICONDUCTOR INC

IC chemical mechanical planarization process incorporating slurry temperature control

CHANG HE BIO-MEDICAL SCIENCE (YANGZHOU) CO LTD

Micro-devices for improved disease detection

ANPAC BIO MEDICAL SCIENCE LISHUI CO LTD

Methods and apparatus for enhanced detection of diseases

ANPAC BIO MEDICAL SCIENCE SHANGHAI CO LTD

Apparatus for improved disease detection