Inventor
MA YING
US26 patents
⚠️ This page may combine multiple inventors who share the name “MA YING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS10428426B2Oct 1, 2019
Method and apparatus to prevent deposition rate/thickness drift, reduce particle defects and increase remote plasma system lifetime
APPLIED MATERIALS INC9 citations83
US11866821B2Jan 9, 2024
Substrate support cover for high-temperature corrosive environment
APPLIED MATERIALS INC2 citations69
US10934620B2Mar 2, 2021
Integration of dual remote plasmas sources for flowable CVD
APPLIED MATERIALS INC0 citations51
US10763154B2Sep 1, 2020
Measurement of flatness of a susceptor of a display CVD chamber
APPLIED MATERIALS INC0 citations45
ADVANCED TECH MATERIALS
3 patentsUS6692546B2Feb 17, 2004
Chemical mechanical polishing compositions for metal and associated materials and method of using same
ADVANCED TECH MATERIALS70 citations94
US6800218B2Oct 5, 2004
Abrasive free formulations for chemical mechanical polishing of copper and associated materials and method of using same
ADVANCED TECH MATERIALS36 citations92
US7029373B2Apr 18, 2006
Chemical mechanical polishing compositions for metal and associated materials and method of using same
ADVANCED TECH MATERIALS47 citations91