Inventor

SCHEURING GERD

DE2 patents

⚠️ This page may combine multiple inventors who share the name “SCHEURING GERD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEICA MICROSYSTEMS

1 patent

US7375792B2May 20, 2008

Apparatus for measuring feature widths on masks for the semiconductor industry

LEICA MICROSYSTEMS0 citations40

MUETEC AUTOMATISIERTE MIKROSKO

1 patent

US7460962B2Dec 2, 2008

Method for an automatic optical measuring of an OPC structure

MUETEC AUTOMATISIERTE MIKROSKO0 citations21