Inventor
VAN LOENHOUT ELKE
NL3 patents
Patents
3 patentsUS7411667B2Aug 12, 2008
Method for correcting disturbances in a level sensor light path
ASML NETHERLANDS BV11 citations77
US7751059B2Jul 6, 2010
Method for correcting disturbances in a level sensor light path
ASML NETHERLANDS BV8 citations76
US7542127B2Jun 2, 2009
Lithographic apparatus and method for manufacturing a device
ASML NETHERLANDS BV7 citations71