Inventor

BAYRAKTAR MUHARREM

NL2 patents

Patents

2 patents

US9442383B2Sep 13, 2016

EUV-mirror arrangement, optical system with EUV-mirror arrangement and associated operating method

ZEISS CARL SMT GMBH3 citations69

US9997268B2Jun 12, 2018

EUV-mirror, optical system with EUV-mirror and associated operating method

ZEISS CARL SMT GMBH1 citations48