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Inventor
GOLUBTSOV ILYA
RU
2 patents
⚠️ This page may combine multiple inventors who share the name “GOLUBTSOV ILYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
1 patent
US7340706B2
Mar 4, 2008
Method and system for analyzing the quality of an OPC mask
LSI LOGIC CORP
7 citations
69
LSI CORP
1 patent
US7493577B2
Feb 17, 2009
Automatic recognition of geometric points in a target IC design for OPC mask quality calculation
LSI CORP
2 citations
58