Inventor
SADA TETSUYA
JP11 patents
⚠️ This page may combine multiple inventors who share the name “SADA TETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS6129546AOct 10, 2000
Heat process apparatus and heat process method
TOKYO ELECTRON LTD530 citations98
US5941083AAug 24, 1999
Cooling device and cooling method
TOKYO ELECTRON LTD41 citations96
US6159288ADec 12, 2000
Method and apparatus for cleaning treatment
TOKYO ELECTRON LTD57 citations95
US6238511B1May 29, 2001
Method and apparatus for processing substrate
TOKYO ELECTRON LTD34 citations92
US6216475B1Apr 17, 2001
Cooling device and cooling method
TOKYO ELECTRON LTD19 citations92
US6062240AMay 16, 2000
Treatment device
TOKYO ELECTRON LTD45 citations91
US6456480B1Sep 24, 2002
Processing apparatus and a processing method
TOKYO ELECTRON LTD18 citations84
US6391110B1May 21, 2002
Method and apparatus for cleaning treatment
TOKYO ELECTRON LTD15 citations83
US6889764B2May 10, 2005
Cooling device and cooling method
TOKYO ELECTRON LTD10 citations74
US6002572ADec 14, 1999
Processing apparatus and a processing method
TOKYO ELECTRON LTD15 citations73