Inventor
VAN DER HOFF ALEXANDER HENDRIK
NL4 patents
Patents
4 patentsUS7403264B2Jul 22, 2008
Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus
ASML NETHERLANDS BV24 citations90
US7262831B2Aug 28, 2007
Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus
ASML NETHERLANDS BV38 citations90
US7626684B2Dec 1, 2009
Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus
ASML NETHERLANDS BV14 citations80
US7466413B2Dec 16, 2008
Marker structure, mask pattern, alignment method and lithographic method and apparatus
ASML NETHERLANDS BV11 citations78