Inventor
CREVASSE ANNETTE M
US19 patents
⚠️ This page may combine multiple inventors who share the name “CREVASSE ANNETTE M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AGERE SYSTEMS INC
9 patentsUS6558238B1May 6, 2003
Apparatus and method for reclamation of used polishing slurry
AGERE SYSTEMS INC27 citations92
US6514123B1Feb 4, 2003
Semiconductor polishing pad alignment device for a polishing apparatus and method of use
AGERE SYSTEMS INC29 citations92
US6726537B1Apr 27, 2004
Polishing carrier head
AGERE SYSTEMS INC16 citations84
US6579797B1Jun 17, 2003
Cleaning brush conditioning apparatus
AGERE SYSTEMS INC16 citations84
US6551410B2Apr 22, 2003
Method of cleaning a semiconductor wafer with a cleaning brush assembly having a contractible and expandable arbor
AGERE SYSTEMS INC16 citations84
US6750145B2Jun 15, 2004
Method of eliminating agglomerate particles in a polishing slurry
AGERE SYSTEMS INC6 citations74
US6615433B2Sep 9, 2003
Apparatus for detecting wetness of a semiconductor wafer cleaning brush
AGERE SYSTEMS INC8 citations74
US6462305B1Oct 8, 2002
Method of manufacturing a polishing pad using a beam
AGERE SYSTEMS INC2 citations63
US6730603B2May 4, 2004
System and method of determining a polishing endpoint by monitoring signal intensity
AGERE SYSTEMS INC3 citations58
LUCENT TECHNOLOGIES INC
5 patentsUS6059638AMay 9, 2000
Magnetic force carrier and ring for a polishing apparatus
LUCENT TECHNOLOGIES INC82 citations94
US6121142ASep 19, 2000
Magnetic frictionless gimbal for a polishing apparatus
LUCENT TECHNOLOGIES INC22 citations92
US6097484AAug 1, 2000
Location of defects using dye penetration
LUCENT TECHNOLOGIES INC20 citations89
US6264536B1Jul 24, 2001
Reducing polish platen corrosion during integrated circuit fabrication
LUCENT TECHNOLOGIES INC10 citations73
US6508363B1Jan 21, 2003
Slurry container
LUCENT TECHNOLOGIES INC5 citations62
AGERE SYST GUARDIAN CORP
4 patentsUS6354928B1Mar 12, 2002
Polishing apparatus with carrier ring and carrier head employing like polarities
AGERE SYST GUARDIAN CORP87 citations98
US6423149B1Jul 23, 2002
Apparatus and method for gradient cleaning of semiconductor wafers
AGERE SYST GUARDIAN CORP25 citations92
US6355184B1Mar 12, 2002
Method of eliminating agglomerate particles in a polishing slurry
AGERE SYST GUARDIAN CORP8 citations74
US6402599B1Jun 11, 2002
Slurry recirculation system for reduced slurry drying
AGERE SYST GUARDIAN CORP10 citations71