Inventor

MAZE JOHN A

US20 patents

⚠️ This page may combine multiple inventors who share the name “MAZE JOHN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MAZE JOHN A

AGERE SYST GUARDIAN CORP

Polishing apparatus with carrier ring and carrier head employing like polarities

Apparatus and method for gradient cleaning of semiconductor wafers

Corrosion-resistant polishing pad conditioner

Method of eliminating agglomerate particles in a polishing slurry

Slurry recirculation system for reduced slurry drying

Wafer carrier modification for reduced extraction force

Terminal block extension for greater wire packing efficiency

AGERE SYSTEMS INC

Apparatus and method for reclamation of used polishing slurry

Semiconductor polishing pad alignment device for a polishing apparatus and method of use

Polishing carrier head

Cleaning brush conditioning apparatus

Method of cleaning a semiconductor wafer with a cleaning brush assembly having a contractible and expandable arbor

Method of eliminating agglomerate particles in a polishing slurry

Apparatus for detecting wetness of a semiconductor wafer cleaning brush

LUCENT TECHNOLOGIES INC

Magnetic force carrier and ring for a polishing apparatus

Magnetic frictionless gimbal for a polishing apparatus

Method of reducing agglomerate particles in a polishing slurry

Apparatus and method for determining a need to change a polishing pad conditioning wheel

Polishing head release mechanism

Wafer carrier head for prevention of unintentional semiconductor wafer rotation