Inventor

ZHANG HEQUN

CN2 patents

Patents

2 patents

US9841690B2Dec 12, 2017

Method and apparatus for exposure pattern correction and exposure system

BOE TECHNOLOGY GROUP CO LTD0 citations42

US9719723B2Aug 1, 2017

Substrate support structure, vacuum drying apparatus and method for vacuum drying a substrate

BOE TECHNOLOGY GROUP CO LTD0 citations40