Inventor

MICELI FRANK

US40 patents

⚠️ This page may combine multiple inventors who share the name “MICELI FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MICELI FRANK

AGERE SYSTEMS INC

Apparatus and method for reclamation of used polishing slurry

Semiconductor polishing pad alignment device for a polishing apparatus and method of use

Polishing head for pressurized delivery of slurry

Polishing carrier head

Cleaning brush conditioning apparatus

Method of cleaning a semiconductor wafer with a cleaning brush assembly having a contractible and expandable arbor

Mouse and mouse template for a motion impaired user

Method of eliminating agglomerate particles in a polishing slurry

Apparatus for detecting wetness of a semiconductor wafer cleaning brush

Curvilinear chemical mechanical planarization device and method

Chemical mechanical polisher including a pad conditioner and a method of manufacturing an integrated circuit using the chemical mechanical polisher

Method of manufacturing a polishing pad using a beam

Method and system of using offset gage for CMP polishing pad alignment and adjustment

Method and apparatus for cleaning slurry depositions from a water carrier

System and method of determining a polishing endpoint by monitoring signal intensity

System of using offset gage for CMP polishing pad alignment and adjustment

Analog phone bank connector

LUCENT TECHNOLOGIES INC

Method of polishing semiconductor structures using a two-step chemical mechanical planarization with slurry particles having different particle bulk densities

Apparatus and method for conditioning a polishing pad

Apparatus and method for determining a need to change a polishing pad conditioning wheel

Method for inserting wires into a telephone jack connector

Computer pointer device for handicapped persons

Method and tool that removes an electrical connecting block from a telecommunications board

Reducing polish platen corrosion during integrated circuit fabrication

Method for removing microorganism contamination from a polishing slurry

Polishing head release mechanism

Slurry container

Longer lifetime warm-up wafers for polishing systems

Wafer carrier head for prevention of unintentional semiconductor wafer rotation

AGERE SYST GUARDIAN CORP

Electrochemical mechanical planarization apparatus and method

Polishing apparatus with carrier ring and carrier head employing like polarities

Apparatus and method for gradient cleaning of semiconductor wafers

Method of eliminating agglomerate particles in a polishing slurry

Test structures for testing planarization systems and methods for using same

Apparatus for chemical mechanical polishing endpoint detection using a hydrogen sensor

Slurry recirculation system for reduced slurry drying

Apparatus and method for in-situ measurement of polishing pad thickness loss

Reference thickness endpoint techniques for polishing operations

Wafer carrier modification for reduced extraction force

Terminal block extension for greater wire packing efficiency