Inventor
KUNG YAO-HSIUNG
TW8 patents
Patents
8 patentsUS6834547B2Dec 28, 2004
Humidity sensor and fabrication method thereof
NANYA TECHNOLOGY CORP11 citations72
US7252099B2Aug 7, 2007
Wafer cleaning apparatus with multiple wash-heads
NANYA TECHNOLOGY CORP8 citations71
US11877435B2Jan 16, 2024
Semiconductor structure having air gap
NANYA TECHNOLOGY CORP0 citations59
US11823951B2Nov 21, 2023
Method of manufacturing semiconductor structure having air gap
NANYA TECHNOLOGY CORP0 citations59
US6941811B2Sep 13, 2005
Method and apparatus for detecting wafer flaw
NANYA TECHNOLOGY CORP5 citations57
US12526983B2Jan 13, 2026
Semiconductor structure and method of manufacturing the same
NANYA TECHNOLOGY CORP0 citations52
US12563756B2Feb 24, 2026
Memory device having a container-shaped electrode
NANYA TECHNOLOGY CORP0 citations49
US6920796B2Jul 26, 2005
Device used for detecting clamping force of processed object and method thereof
NANYA TECHNOLOGY CORP1 citations48