Inventor
LIN CHUNG-MIN
TW8 patents
⚠️ This page may combine multiple inventors who share the name “LIN CHUNG-MIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NANYA TECHNOLOGY CORP
6 patentsUS6025263AFeb 15, 2000
Underlayer process for high O3 /TEOS interlayer dielectric deposition
NANYA TECHNOLOGY CORP43 citations91
US6834547B2Dec 28, 2004
Humidity sensor and fabrication method thereof
NANYA TECHNOLOGY CORP11 citations72
US6575820B2Jun 10, 2003
Chemical mechanical polishing apparatus
NANYA TECHNOLOGY CORP10 citations71
US6153482ANov 28, 2000
Method for fabricating LOCOS isolation having a planar surface which includes having the polish stop layer at a lower level than the LOCOS formation
NANYA TECHNOLOGY CORP6 citations58
US6920796B2Jul 26, 2005
Device used for detecting clamping force of processed object and method thereof
NANYA TECHNOLOGY CORP1 citations48
US6745631B2Jun 8, 2004
Method of measuring pore depth on the surface of a polishing pad
NANYA TECHNOLOGY CORP0 citations40