Inventor
TSAI HSIN-CHUAN
TW14 patents
⚠️ This page may combine multiple inventors who share the name “TSAI HSIN-CHUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NANYA TECHNOLOGY CORP
12 patentsUS6448150B1Sep 10, 2002
Method for forming shallow trench isolation in the integrated circuit
NANYA TECHNOLOGY CORP71 citations95
US6365506B1Apr 2, 2002
Dual-damascene process with porous low-K dielectric material
NANYA TECHNOLOGY CORP60 citations95
US6713341B2Mar 30, 2004
Method of forming a bottle-shaped trench in a semiconductor substrate
NANYA TECHNOLOGY CORP38 citations92
US6117726ASep 12, 2000
Method of making a trench capacitor
NANYA TECHNOLOGY CORP27 citations91
US6025263AFeb 15, 2000
Underlayer process for high O3 /TEOS interlayer dielectric deposition
NANYA TECHNOLOGY CORP43 citations91
US6368912B1Apr 9, 2002
Method of fabricating an isolation structure between a vertical transistor and a deep trench capacitor
NANYA TECHNOLOGY CORP27 citations88
US6211006B1Apr 3, 2001
Method of forming a trench-type capacitor
NANYA TECHNOLOGY CORP15 citations83
US6929998B2Aug 16, 2005
Method for forming bottle-shaped trench
NANYA TECHNOLOGY CORP11 citations73
US6834547B2Dec 28, 2004
Humidity sensor and fabrication method thereof
NANYA TECHNOLOGY CORP11 citations72
US6093601AJul 25, 2000
Method of fabricating crown capacitor by using oxynitride mask
NANYA TECHNOLOGY CORP5 citations62
US6071790AJun 6, 2000
Method of crown capacitor rounding by oxidant dipping process
NANYA TECHNOLOGY CORP4 citations62
US6761624B2Jul 13, 2004
Chemical mechanical polishing apparatus
NANYA TECHNOLOGY CORP0 citations50