Inventor
OGUNI KUMIKO
JP4 patents
Patents
4 patentsUS6916582B2Jul 12, 2005
Mask for fabrication of semiconductor devices, process for production of the same, and process for fabrication of semiconductor devices
SONY CORP9 citations72
US6969571B2Nov 29, 2005
Exposure method using complementary divided mask, exposure apparatus, semiconductor device, and method of producing the same
SONY CORP9 citations71
US7369213B2May 6, 2008
Exposure method using complementary divided mask, exposure apparatus, semiconductor device, and method of producing the same
SONY CORP4 citations60
US7160655B2Jan 9, 2007
Exposure method using complementary divided mask, exposure apparatus, semiconductor device, and method of producing the same
SONY CORP2 citations60