Inventor
TSUCHIYAMA HIROFUMI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “TSUCHIYAMA HIROFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
5 patentsUS6753972B1Jun 22, 2004
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same
HITACHI LTD87 citations98
US7417244B2Aug 26, 2008
Surface inspection apparatus and method thereof
HITACHI LTD9 citations83
US6806970B2Oct 19, 2004
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same
HITACHI LTD12 citations74
US7952085B2May 31, 2011
Surface inspection apparatus and method thereof
HITACHI LTD6 citations73
US6468817B2Oct 22, 2002
Semiconductor integrated circuit device manufacturing method including chemical mechanical polishing, and detection and evaluation of microscratches caused thereby
HITACHI LTD4 citations61
RENESAS TECH CORP
4 patentsUS6979649B2Dec 27, 2005
Fabrication method of semiconductor integrated circuit device
RENESAS TECH CORP12 citations91
US7250365B2Jul 31, 2007
Fabrication method of semiconductor integrated circuit device
RENESAS TECH CORP10 citations83
US7718526B2May 18, 2010
Fabrication method of semiconductor integrated circuit device
RENESAS TECH CORP2 citations61
US6979650B2Dec 27, 2005
Fabrication method of semiconductor integrated circuit device
RENESAS TECH CORP2 citations54