Inventor
TAKAMIZAWA SHOICHI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TAKAMIZAWA SHOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU HANDOTAI KK
4 patentsUS5998283ADec 7, 1999
Silicon wafer having plasma CVD gettering layer with components/composition changing in depth-wise direction and method of manufacturing the silicon wafer
SHINETSU HANDOTAI KK19 citations91
US5993493ANov 30, 1999
Method of manufacturing mirror-polished silicon wafers, and apparatus for processing silicon wafers
SHINETSU HANDOTAI KK7 citations72
US7214271B2May 8, 2007
Silicon single crystal wafer process apparatus, silicon single crystal wafer, and manufacturing method of silicon epitaxial wafer
SHINETSU HANDOTAI KK7 citations71
US5899744AMay 4, 1999
Method of manufacturing semiconductor wafers
SHINETSU HANDOTAI KK12 citations70