P

Inventor

UMEMURA KAORU

JP81 patents
⚠️ This page may combine multiple inventors who share the name “UMEMURA KAORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

37 patents
US6927391B2Aug 9, 2005

Method and apparatus for processing a micro sample

HITACHI LTD69 citations99
US6781125B2Aug 24, 2004

Method and apparatus for processing a micro sample

HITACHI LTD114 citations99
US6664552B2Dec 16, 2003

Method and apparatus for specimen fabrication

HITACHI LTD139 citations99
US6538254B1Mar 25, 2003

Method and apparatus for sample fabrication

HITACHI LTD315 citations99
US6734687B1May 11, 2004

Apparatus for detecting defect in device and method of detecting defect

HITACHI LTD134 citations98
US6717156B2Apr 6, 2004

Beam as well as method and equipment for specimen fabrication

HITACHI LTD109 citations98
US7071475B2Jul 4, 2006

Method and apparatus for specimen fabrication

HITACHI LTD61 citations97
US6828566B2Dec 7, 2004

Method and apparatus for specimen fabrication

HITACHI LTD62 citations97
US5825035AOct 20, 1998

Processing method and apparatus using focused ion beam generating means

HITACHI LTD140 citations97
US7550750B2Jun 23, 2009

Method and apparatus for processing a micro sample

HITACHI LTD26 citations96
US7205560B2Apr 17, 2007

Method and apparatus for processing a micro sample

HITACHI LTD32 citations96
US7205554B2Apr 17, 2007

Method and apparatus for processing a micro sample

HITACHI LTD34 citations96
US7138628B2Nov 21, 2006

Method and apparatus for specimen fabrication

HITACHI LTD35 citations96
US6797954B2Sep 28, 2004

Patterned wafer inspection method and apparatus therefor

HITACHI LTD42 citations96
US6794663B2Sep 21, 2004

Method and apparatus for specimen fabrication

HITACHI LTD33 citations96
US6583426B1Jun 24, 2003

Projection ion beam machining apparatus

HITACHI LTD56 citations96
US6476390B1Nov 5, 2002

Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams

HITACHI LTD68 citations96
US5583344ADec 10, 1996

Process method and apparatus using focused ion beam generating means

HITACHI LTD73 citations96
US5504340AApr 2, 1996

Process method and apparatus using focused ion beam generating means

HITACHI LTD94 citations96
US4774414ASep 27, 1988

Liquid metal ion source

HITACHI LTD56 citations96
US7888639B2Feb 15, 2011

Method and apparatus for processing a micro sample

HITACHI LTD14 citations93
US7525108B2Apr 28, 2009

Focused ion beam apparatus for specimen fabrication

HITACHI LTD16 citations93
US7470918B2Dec 30, 2008

Method and apparatus for processing a micro sample

HITACHI LTD22 citations93
US7465945B2Dec 16, 2008

Method and apparatus for processing a micro sample

HITACHI LTD20 citations93
US7397052B2Jul 8, 2008

Method and apparatus for specimen fabrication

HITACHI LTD16 citations93
US7397050B2Jul 8, 2008

Method and apparatus for specimen fabrication

HITACHI LTD16 citations93
US7176458B2Feb 13, 2007

Method and apparatus for specimen fabrication

HITACHI LTD18 citations93
US6979823B2Dec 27, 2005

Patterned wafer inspection method and apparatus therefor

HITACHI LTD21 citations93
US6147347ANov 14, 2000

Ion source and mass spectrometer instrument using the same

HITACHI LTD31 citations93
US5399865AMar 21, 1995

Liquid metal ion source with high temperature cleaning apparatus for cleaning the emitter and reservoir

HITACHI LTD30 citations93
US4755685AJul 5, 1988

Ion micro beam apparatus

HITACHI LTD41 citations93
US4697086ASep 29, 1987

Apparatus for implanting ion microbeam

HITACHI LTD35 citations93
US7897936B2Mar 1, 2011

Method and apparatus for specimen fabrication

HITACHI LTD15 citations92
US7268356B2Sep 11, 2007

Method and apparatus for specimen fabrication

HITACHI LTD28 citations92
US6750451B2Jun 15, 2004

Observation apparatus and observation method using an electron beam

HITACHI LTD32 citations92
US5120925AJun 9, 1992

Methods for device transplantation

HITACHI LTD28 citations92
US4740698AApr 26, 1988

Hybrid charged particle apparatus

HITACHI LTD32 citations92

HITACHI HIGH TECH CORP

8 patents
US8779400B2Jul 15, 2014

Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample

HITACHI HIGH TECH CORP91 citations98
US7095021B2Aug 22, 2006

Method, apparatus and system for specimen fabrication by using an ion beam

HITACHI HIGH TECH CORP19 citations93
US7700931B2Apr 20, 2010

Ion beam processing apparatus

HITACHI HIGH TECH CORP20 citations92
US7005651B2Feb 28, 2006

Liquid metal ion gun

HITACHI HIGH TECH CORP12 citations92
US7777183B2Aug 17, 2010

Charge particle beam system, sample processing method, and semiconductor inspection system

HITACHI HIGH TECH CORP13 citations84
US7592606B2Sep 22, 2009

Manufacturing equipment using ION beam or electron beam

HITACHI HIGH TECH CORP11 citations84
US7420181B2Sep 2, 2008

Liquid metal ion gun

HITACHI HIGH TECH CORP10 citations84
US7368729B2May 6, 2008

Method, apparatus and system for specimen fabrication by using an ion beam

HITACHI HIGH TECH CORP12 citations84

SHICHI HIROYASU

1 patent
US8481980B2Jul 9, 2013

Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample

SHICHI HIROYASU17 citations92

HITACHI ULSI SYS CO LTD

1 patent
US6970004B2Nov 29, 2005

Apparatus for inspecting defects of devices and method of inspecting defects

HITACHI ULSI SYS CO LTD18 citations92

TOKUDA MITSUO

1 patent
US8222618B2Jul 17, 2012

Method and apparatus for processing a microsample

TOKUDA MITSUO9 citations91

IBM

1 patent
US6650491B2Nov 18, 2003

System and method for setting a read/write offset and for recovering from data read errors

IBM47 citations91

HITACHI GLOBAL STORAGE TECH

1 patent
US7733589B2Jun 8, 2010

Alternate cylinder table to improve adjacent track interference problem

HITACHI GLOBAL STORAGE TECH13 citations84

Showing the top 50 of 81 patents by PatentIndex Score.