Inventor
KEIGLER ARTHUR
US37 patents
⚠️ This page may combine multiple inventors who share the name “KEIGLER ARTHUR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KEIGLER ARTHUR
9 patentsUS9257319B2Feb 9, 2016
Parallel single substrate processing system with alignment features on a process section frame
KEIGLER ARTHUR4 citations83
US8425687B2Apr 23, 2013
Wetting a workpiece surface in a fluid-processing system
KEIGLER ARTHUR8 citations83
US9508582B2Nov 29, 2016
Parallel single substrate marangoni module
KEIGLER ARTHUR2 citations61
US8277624B2Oct 2, 2012
Method and apparatus for fluid processing a workpiece
KEIGLER ARTHUR1 citations61
US8168057B2May 1, 2012
Balancing pressure to improve a fluid seal
KEIGLER ARTHUR3 citations61
US8512543B2Aug 20, 2013
Method for fluid processing a workpiece
KEIGLER ARTHUR0 citations51
US9449862B2Sep 20, 2016
Parallel single substrate processing system
KEIGLER ARTHUR0 citations50
US9293356B2Mar 22, 2016
Parallel single substrate processing system
KEIGLER ARTHUR0 citations49
US9714474B2Jul 25, 2017
Seed layer deposition in microscale features
KEIGLER ARTHUR0 citations39
GOODMAN DANIEL
7 patentsUS9421617B2Aug 23, 2016
Substrate holder
GOODMAN DANIEL20 citations91
US8967935B2Mar 3, 2015
Substrate loader and unloader
GOODMAN DANIEL6 citations82
US8613474B2Dec 24, 2013
Substrate loader and unloader having a Bernoulli support
GOODMAN DANIEL5 citations82
US8420981B2Apr 16, 2013
Apparatus for thermal processing with micro-environment
GOODMAN DANIEL8 citations79
US9117856B2Aug 25, 2015
Substrate loader and unloader having an air bearing support
GOODMAN DANIEL3 citations61
US8858755B2Oct 14, 2014
Edge bevel removal apparatus and method
GOODMAN DANIEL0 citations38
US9147588B2Sep 29, 2015
Substrate processing pallet with cooling
GOODMAN DANIEL0 citations35
NEXX SYSTEMS INC
5 patentsUS7445697B2Nov 4, 2008
Method and apparatus for fluid processing a workpiece
NEXX SYSTEMS INC39 citations94
US7727366B2Jun 1, 2010
Balancing pressure to improve a fluid seal
NEXX SYSTEMS INC15 citations91
US7100954B2Sep 5, 2006
Ultra-thin wafer handling system
NEXX SYSTEMS INC51 citations90
US8038856B2Oct 18, 2011
Method and apparatus for fluid processing a workpiece
NEXX SYSTEMS INC7 citations82
US7722747B2May 25, 2010
Method and apparatus for fluid processing a workpiece
NEXX SYSTEMS INC7 citations72
TEL NEXX INC
5 patentsUS9988735B2Jun 5, 2018
Electrochemical deposition apparatus and methods for controlling the chemistry therein
TEL NEXX INC2 citations69
US9637836B2May 2, 2017
Electrochemical deposition apparatus and methods for controlling the chemistry therein
TEL NEXX INC2 citations69
US9303329B2Apr 5, 2016
Electrochemical deposition apparatus with remote catholyte fluid management
TEL NEXX INC3 citations68
US9453290B2Sep 27, 2016
Apparatus for fluid processing a workpiece
TEL NEXX INC0 citations50
US10074554B2Sep 11, 2018
Workpiece loader for a wet processing system
TEL NEXX INC0 citations40
ASMPT NEXX INC
3 patentsUS11942341B2Mar 26, 2024
Adaptive focusing and transport system for electroplating
ASMPT NEXX INC0 citations58
US11887874B2Jan 30, 2024
Adaptive focusing and transport system for electroplating
ASMPT NEXX INC0 citations58
US11608563B2Mar 21, 2023
Electrochemical deposition systems
ASMPT NEXX INC0 citations35
(unassigned)
2 patentsUS6251250B1Jun 26, 2001
Method of and apparatus for controlling fluid flow and electric fields involved in the electroplating of substantially flat workpieces and the like and more generally controlling fluid flow in the processing of other work piece surfaces as well
132 citations97
US6174011B1Jan 16, 2001
Method of and apparatus for handling thin and flat workpieces and the like
65 citations96