Inventor
LIU ZHENQIU
US10 patents
⚠️ This page may combine multiple inventors who share the name “LIU ZHENQIU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEXX SYSTEMS INC
4 patentsUS7445697B2Nov 4, 2008
Method and apparatus for fluid processing a workpiece
NEXX SYSTEMS INC39 citations94
US7727366B2Jun 1, 2010
Balancing pressure to improve a fluid seal
NEXX SYSTEMS INC15 citations91
US8038856B2Oct 18, 2011
Method and apparatus for fluid processing a workpiece
NEXX SYSTEMS INC7 citations82
US7722747B2May 25, 2010
Method and apparatus for fluid processing a workpiece
NEXX SYSTEMS INC7 citations72
KEIGLER ARTHUR
4 patentsUS8277624B2Oct 2, 2012
Method and apparatus for fluid processing a workpiece
KEIGLER ARTHUR1 citations61
US8168057B2May 1, 2012
Balancing pressure to improve a fluid seal
KEIGLER ARTHUR3 citations61
US8512543B2Aug 20, 2013
Method for fluid processing a workpiece
KEIGLER ARTHUR0 citations51
US9714474B2Jul 25, 2017
Seed layer deposition in microscale features
KEIGLER ARTHUR0 citations39