Inventor
WU QUNWEI
US13 patents
⚠️ This page may combine multiple inventors who share the name “WU QUNWEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEXX SYSTEMS INC
4 patentsUS7445697B2Nov 4, 2008
Method and apparatus for fluid processing a workpiece
NEXX SYSTEMS INC39 citations94
US7727366B2Jun 1, 2010
Balancing pressure to improve a fluid seal
NEXX SYSTEMS INC15 citations91
US8038856B2Oct 18, 2011
Method and apparatus for fluid processing a workpiece
NEXX SYSTEMS INC7 citations82
US7722747B2May 25, 2010
Method and apparatus for fluid processing a workpiece
NEXX SYSTEMS INC7 citations72
ENTEGRIS INC
3 patentsUS7387661B2Jun 17, 2008
Pleated construction for effecting gas transfer membrane
ENTEGRIS INC10 citations82
US7822586B2Oct 26, 2010
System and method for optimizing and simulating thermal management systems and predictive flow control
ENTEGRIS INC5 citations62
US7311808B2Dec 25, 2007
Device and method for increasing mass transport at liquid-solid diffusion boundary layer
ENTEGRIS INC0 citations51