Inventor

SHIGETA Mari

JP2 patents

Patents

2 patents

US10023797B2Jul 17, 2018

Liquid composition for etching oxides comprising indium, zinc, tin, and oxygen and etching method

MITSUBISHI GAS CHEMICAL CO1 citations42

US9824899B2Nov 21, 2017

Etching liquid for oxide containing zinc and tin, and etching method

MITSUBISHI GAS CHEMICAL CO0 citations42