P

Inventor

HEO SEOK

KR22 patents
⚠️ This page may combine multiple inventors who share the name “HEO SEOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

12 patents
US10553464B2Feb 4, 2020

System and method for controlling semiconductor manufacturing facility, method of manufacturing integrated circuit using the system and method, and method of manufacturing processor using the system and method

SAMSUNG ELECTRONICS CO LTD2 citations70
US9889556B2Feb 13, 2018

Link structure

SAMSUNG ELECTRONICS CO LTD2 citations70
US11027394B2Jun 8, 2021

Load cup and chemical mechanical polishing apparatus and method of manufacturing including the same

SAMSUNG ELECTRONICS CO LTD2 citations68
US11315817B2Apr 26, 2022

Apparatus for transferring wafer, method for transferring wafer using the same with three sensors

SAMSUNG ELECTRONICS CO LTD2 citations64
US12372885B2Jul 29, 2025

Substrate processing apparatus and method of fabricating semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD0 citations62
US11927890B1Mar 12, 2024

Substrate processing apparatus and method of fabricating semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD0 citations62
US11733616B2Aug 22, 2023

System for supplying photoresist and method for fabricating semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD1 citations61
US11456195B2Sep 27, 2022

Wafer processing apparatus and wafer processing method using the same apparatus

SAMSUNG ELECTRONICS CO LTD1 citations53
US12547071B2Feb 10, 2026

Spin coater

SAMSUNG ELECTRONICS CO LTD0 citations47
US11923209B2Mar 5, 2024

Substrate processing apparatus and substrate processing method

SAMSUNG ELECTRONICS CO LTD0 citations45
US11590460B2Feb 28, 2023

Chemical solution evaporation device and substrate processing device including the same

SAMSUNG ELECTRONICS CO LTD0 citations45
US12568790B2Mar 3, 2026

Substrate processing apparatus and method of manufacturing semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD0 citations44

LG ELECTRONICS INC

2 patents

FAIRCHILD KOREA SEMICONDUCTOR LTD

2 patents

HEO SEOK

2 patents

SEOUL NAT UNIV IND FOUNDATION

1 patent

JINWOONG TECHNOLOGY

1 patent

KIM SUNGHWAN

1 patent

JINWOONG TECH CO LTD

1 patent