Inventor
HEO SEOK
KR22 patents
⚠️ This page may combine multiple inventors who share the name “HEO SEOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
12 patentsUS10553464B2Feb 4, 2020
System and method for controlling semiconductor manufacturing facility, method of manufacturing integrated circuit using the system and method, and method of manufacturing processor using the system and method
SAMSUNG ELECTRONICS CO LTD2 citations70
US9889556B2Feb 13, 2018
Link structure
SAMSUNG ELECTRONICS CO LTD2 citations70
US11027394B2Jun 8, 2021
Load cup and chemical mechanical polishing apparatus and method of manufacturing including the same
SAMSUNG ELECTRONICS CO LTD2 citations68
US11315817B2Apr 26, 2022
Apparatus for transferring wafer, method for transferring wafer using the same with three sensors
SAMSUNG ELECTRONICS CO LTD2 citations64
US12372885B2Jul 29, 2025
Substrate processing apparatus and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations62
US11927890B1Mar 12, 2024
Substrate processing apparatus and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations62
US11733616B2Aug 22, 2023
System for supplying photoresist and method for fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD1 citations61
US11456195B2Sep 27, 2022
Wafer processing apparatus and wafer processing method using the same apparatus
SAMSUNG ELECTRONICS CO LTD1 citations53
US12547071B2Feb 10, 2026
Spin coater
SAMSUNG ELECTRONICS CO LTD0 citations47
US11923209B2Mar 5, 2024
Substrate processing apparatus and substrate processing method
SAMSUNG ELECTRONICS CO LTD0 citations45
US11590460B2Feb 28, 2023
Chemical solution evaporation device and substrate processing device including the same
SAMSUNG ELECTRONICS CO LTD0 citations45
US12568790B2Mar 3, 2026
Substrate processing apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations44