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Inventor
LIU YUH-TURNG
TW
4 patents
⚠️ This page may combine multiple inventors who share the name “LIU YUH-TURNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MACRONIX INT CO LTD
3 patents
US6688945B2
Feb 10, 2004
CMP endpoint detection system
MACRONIX INT CO LTD
22 citations
87
US6524176B1
Feb 25, 2003
Polishing pad
MACRONIX INT CO LTD
20 citations
87
US7354523B2
Apr 8, 2008
Methods for sidewall etching and etching during filling of a trench
MACRONIX INT CO LTD
0 citations
47
UNITED MICROELECTRONICS CORP
1 patent
US7759734B2
Jul 20, 2010
Semiconductor device
UNITED MICROELECTRONICS CORP
4 citations
57