Inventor
VAN DE WIEL WILHELMUS J T P
NL3 patents
Patents
3 patentsUS6525803B2Feb 25, 2003
Balanced positioning system for use in lithographic apparatus
ASML NETHERLANDS BV46 citations93
US7034920B2Apr 25, 2006
Balanced positioning system for use in lithographic apparatus
ASML NETHERLANDS BV11 citations81
US7202937B2Apr 10, 2007
Balanced positioning system for use in lithographic apparatus
ASML NETHERLANDS BV2 citations60