Inventor
MORISAWA TOSHIHIRO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “MORISAWA TOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MORISAWA TOSHIHIRO
4 patentsUS9110461B2Aug 18, 2015
Semiconductor manufacturing equipment
MORISAWA TOSHIHIRO13 citations82
US8924001B2Dec 30, 2014
Etching apparatus, control simulator, and semiconductor device manufacturing method
MORISAWA TOSHIHIRO5 citations71
US8486290B2Jul 16, 2013
Etching apparatus, analysis apparatus, etching treatment method, and etching treatment program
MORISAWA TOSHIHIRO5 citations71
US8282849B2Oct 9, 2012
Etching process state judgment method and system therefor
MORISAWA TOSHIHIRO3 citations61