Inventor

LIN CHUANG-CHIA

US39 patents

⚠️ This page may combine multiple inventors who share the name “LIN CHUANG-CHIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LIN CHUANG-CHIA

APPLIED MATERIALS INC

Optical wall and process sensor with plasma facing sensor

In-situ optical chamber surface and process sensor

In-chamber low-profile sensor assembly

Micro resonator array system

MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing

MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing

In-situ optical chamber surface and process sensor

Micro resonator array sensor for detecting wafer processing parameters

High quality factor embedded resonator wafers

Method for detecting wafer processing parameters with micro resonator array sensors

Radical sensor substrate

Microwave resonator array for plasma diagnostics

In-chamber low-profile sensor assembly

Optical spectrum sensor wafer or robot for chamber condition monitoring

Printed microwave resonator for measuring high electron density plasmas

Miniature low profile harsh environment wireless sensor with tunable antenna

Surface acoustic wave sensor assembly

Surface acoustic wave sensor assembly

ROSEMOUNT AEROSPACE INC

Mechanical latch locking detection sensors

Mechanical latch locking detection sensors

Force balanced impeller flow meter for mass flow rate control

Coriolis effect mass flow meter and gyroscope

Wireless surface acoustic wave-based proximity sensor, sensing system and method

MICROSCAN SYSTEMS INC

Process for manufacturing micromechanical and microoptomechanical structures with backside metalization

Process for manufacturing micromechanical and microoptomechanical structures with single crystal silicon exposure step

Micromechanical and microoptomechanical structures with single crystal silicon exposure step

Process for manufacturing micromechanical and microoptomechanical structures with pre-applied patterning

GOODRICH CORP

Systems and methods for mounting landing gear strain sensors

Hoist and winch cable angle sensor

Hoist and winch cable angle sensor

Hoist and winch cable angle sensor

ANALOG DEVICES INC

Optical cross-connect system

Self assembled micro anti-stiction structure

MEMS mirrors with precision clamping mechanism

XEROX CORP

Method of forming protrusions on single crystal silicon structures built on silicon-on-insulator wafers

Self-aligned micro hinges

DANEMAN MICHAEL J

Mems element having perpendicular portion formed from substrate

ONIX MICROSYSTEMS INC

Method of making a MEMS element having perpendicular portion formed from substrate

LIN CHUANG-CHIA

Hoist health and usage monitoring system and components thereof