Inventor

RADOVIC DUSAN

DE2 patents

Patents

2 patents

US11874291B2Jan 16, 2024

Method for temperature compensation of a microelectromechanical sensor, and microelectromechanical sensor

BOSCH GMBH ROBERT1 citations57

US11417552B2Aug 16, 2022

Method and device for determining a feature for devices produced on a wafer

BOSCH GMBH ROBERT0 citations53