Inventor
DUNN DERREN
US3 patents
Patents
3 patentsUS11568101B2Jan 31, 2023
Predictive multi-stage modelling for complex process control
IBM2 citations69
US10768532B2Sep 8, 2020
Co-optimization of lithographic and etching processes with complementary post exposure bake by laser annealing
IBM0 citations39
US10678971B2Jun 9, 2020
Space exploration with Bayesian inference
IBM0 citations38