Inventor

CHEN HUI FRED

US2 patents

⚠️ This page may combine multiple inventors who share the name “CHEN HUI FRED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN HUI FRED

1 patent

US8844546B2Sep 30, 2014

Apparatus and method for cleaning semiconductor substrate using pressurized fluid

CHEN HUI FRED11 citations75

APPLIED MATERIALS INC

1 patent

US7962990B2Jun 21, 2011

Brush box cleaner module with force control

APPLIED MATERIALS INC3 citations60