P

Inventor

LU YEN-WEN

US71 patents
⚠️ This page may combine multiple inventors who share the name “LU YEN-WEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

19 patents
US7873937B2Jan 18, 2011

System and method for lithography simulation

ASML NETHERLANDS BV9 citations93
US11561477B2Jan 24, 2023

Training methods for machine learning assisted optical proximity error correction

ASML NETHERLANDS BV4 citations85
US9903823B2Feb 27, 2018

Metrology method and apparatus

ASML NETHERLANDS BV10 citations83
US8938699B2Jan 20, 2015

Multivariable solver for optical proximity correction

ASML NETHERLANDS BV6 citations83
US9619607B2Apr 11, 2017

Method and apparatus for cost function based simultaneous OPC and SBAR optimization

ASML NETHERLANDS BV7 citations82
US10755025B2Aug 25, 2020

Process window identifier

ASML NETHERLANDS BV7 citations81
US9842186B2Dec 12, 2017

Process window identifier

ASML NETHERLANDS BV11 citations81
US12204250B2Jan 21, 2025

Training methods for machine learning assisted optical proximity error

ASML NETHERLANDS BV1 citations74
US11768440B2Sep 26, 2023

Training methods for machine learning assisted optical proximity error correction

ASML NETHERLANDS BV1 citations73
US11443083B2Sep 13, 2022

Identification of hot spots or defects by machine learning

ASML NETHERLANDS BV2 citations73
US11232249B2Jan 25, 2022

Method for determining curvilinear patterns for patterning device

ASML NETHERLANDS BV5 citations73
US10996565B2May 4, 2021

Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device

ASML NETHERLANDS BV2 citations73
US8448099B2May 21, 2013

Multivariable solver for optical proximity correction

ASML NETHERLANDS BV4 citations73
US8826198B2Sep 2, 2014

Method and apparatus for enhancing signal strength for improved generation and placement of model-based sub-resolution assist features (MB-SRAF)

ASML NETHERLANDS BV4 citations72
US11379648B2Jul 5, 2022

Process window identifier

ASML NETHERLANDS BV2 citations70
US10007744B2Jun 26, 2018

Process based metrology target design

ASML NETHERLANDS BV2 citations68
US8893067B2Nov 18, 2014

System and method for lithography simulation

ASML NETHERLANDS BV2 citations63
US12585196B2Mar 24, 2026

Method and apparatus for controlling a computing process

ASML NETHERLANDS BV0 citations62
US12360461B2Jul 15, 2025

Identification of hot spots or defects by machine learning

ASML NETHERLANDS BV0 citations62

LU YEN-WEN

8 patents

BRION TECH INC

5 patents

ONETTA INC

4 patents

LU YEN WEN

3 patents

KLA TENCOR TECH CORP

2 patents

COMPAL ELECTRONICS INC

2 patents

BRION TECNOLOGIES INC

1 patent

KLA TENCOR

1 patent

LIU HUA-YU

1 patent

WONG WILLIAM S

1 patent

TAO JUN

1 patent

TSAI MIN-CHUN

1 patent

YE JUN

1 patent

Showing the top 50 of 71 patents by PatentIndex Score.