Inventor
SUN MEI
SG22 patents
⚠️ This page may combine multiple inventors who share the name “SUN MEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
7 patentsUS10460966B2Oct 29, 2019
Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications
KLA TENCOR CORP13 citations81
US9823121B2Nov 21, 2017
Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line
KLA TENCOR CORP3 citations73
US9719867B2Aug 1, 2017
Method and system for measuring heat flux
KLA TENCOR CORP5 citations69
US10777393B2Sep 15, 2020
Process condition sensing device and method for plasma chamber
KLA TENCOR CORP1 citations62
US10215626B2Feb 26, 2019
Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line
KLA TENCOR CORP1 citations62
US11823925B2Nov 21, 2023
Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications
KLA TENCOR CORP0 citations59
US11150140B2Oct 19, 2021
Instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications
KLA TENCOR CORP0 citations49
JENSEN EARL
3 patentsSUN MEI
3 patentsUS9222842B2Dec 29, 2015
High temperature sensor wafer for in-situ measurements in active plasma
SUN MEI9 citations79
US9134186B2Sep 15, 2015
Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces
SUN MEI2 citations58
US8604361B2Dec 10, 2013
Component package for maintaining safe operating temperature of components
SUN MEI3 citations52