Inventor

KIYOTA MAKOTO

JP2 patents

Patents

2 patents

US6974963B2Dec 13, 2005

Substrate inspecting device, coating/developing device and substrate inspecting method

TOKYO ELECTRON LTD7 citations69

US6766209B2Jul 20, 2004

Managing system, managing method, host computer, and information collecting/transmitting unit

TOKYO ELECTRON LTD5 citations58