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Inventor
CHUNG TING-YING
US
2 patents
Patents
2 patents
US9633846B2
Apr 25, 2017
Internal plasma grid applications for semiconductor fabrication
LAM RES CORP
8 citations
81
US9230819B2
Jan 5, 2016
Internal plasma grid applications for semiconductor fabrication in context of ion-ion plasma processing
LAM RES CORP
15 citations
81