Inventor

UEHIGASHI TOSHIMITSU

JP3 patents

⚠️ This page may combine multiple inventors who share the name “UEHIGASHI TOSHIMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULVAC CORP

1 patent

US6413392B1Jul 2, 2002

Sputtering device

ULVAC CORP19 citations80

UEHIGASHI TOSHIMITSU

1 patent

US8669191B2Mar 11, 2014

Method for forming Ni film

UEHIGASHI TOSHIMITSU2 citations54

HIGUCHI YASUSHI

1 patent

US8815737B2Aug 26, 2014

Method for forming NiSi film, method for forming silicide film, method for forming metal film for use in silicide-annealing, apparatus for vacuum processing and film-forming apparatus

HIGUCHI YASUSHI0 citations35