Inventor

LEMMEN VERA

NL2 patents

⚠️ This page may combine multiple inventors who share the name “LEMMEN VERA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US7084952B2Aug 1, 2006

Lithographic apparatus, device manufacturing method, and computer-readable storage medium

ASML NETHERLANDS BV8 citations67

ASML NETHERLANDS BVV

1 patent

US6788383B1Sep 7, 2004

Lithographic apparatus, device manufacturing methods, and computer-readable storage medium

ASML NETHERLANDS BVV9 citations60