Inventor
VASCHENKO GEORGIY OLEGOVICH
US5 patents
Patents
5 patentsUS12452986B2Oct 21, 2025
Nozzle apparatus
ASML NETHERLANDS BV0 citations58
US11690159B2Jun 27, 2023
Apparatus and method for extending target material delivery system lifetime
ASML NETHERLANDS BV0 citations58
US12273986B2Apr 8, 2025
Target delivery system
ASML NETHERLANDS BV0 citations57
US11856681B2Dec 26, 2023
Target delivery system
ASML NETHERLANDS BV0 citations57
US11448967B2Sep 20, 2022
Target formation apparatus
ASML NETHERLANDS BV1 citations55