Inventor
KURITA SHINICHI
US133 patents
⚠️ This page may combine multiple inventors who share the name “KURITA SHINICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
29 patentsUSD784276SApr 18, 2017
Susceptor assembly
APPLIED MATERIALS INC333 citations99
US7665951B2Feb 23, 2010
Multiple slot load lock chamber and method of operation
APPLIED MATERIALS INC53 citations97
US7207766B2Apr 24, 2007
Load lock chamber for large area substrate processing system
APPLIED MATERIALS INC69 citations97
US9214340B2Dec 15, 2015
Apparatus and method of forming an indium gallium zinc oxide layer
APPLIED MATERIALS INC313 citations96
US6949143B1Sep 27, 2005
Dual substrate loadlock process equipment
APPLIED MATERIALS INC57 citations96
US6577923B1Jun 10, 2003
Apparatus and method for robotic alignment of substrates
APPLIED MATERIALS INC55 citations96
US8033772B2Oct 11, 2011
Transfer chamber for vacuum processing system
APPLIED MATERIALS INC15 citations93
US7105463B2Sep 12, 2006
Load lock chamber having two dual slot regions
APPLIED MATERIALS INC39 citations93
US7018517B2Mar 28, 2006
Transfer chamber for vacuum processing system
APPLIED MATERIALS INC39 citations93
US6856858B2Feb 15, 2005
Shared sensors for detecting substrate position/presence
APPLIED MATERIALS INC39 citations93
US6746198B2Jun 8, 2004
Substrate transfer shuttle
APPLIED MATERIALS INC42 citations93
US6719851B1Apr 13, 2004
Lid assembly for opening a process chamber lid and uses therefor
APPLIED MATERIALS INC29 citations93
US7845891B2Dec 7, 2010
Decoupled chamber body
APPLIED MATERIALS INC29 citations92
US7086638B2Aug 8, 2006
Methods and apparatus for sealing an opening of a processing chamber
APPLIED MATERIALS INC34 citations92
US6833717B1Dec 21, 2004
Electron beam test system with integrated substrate transfer module
APPLIED MATERIALS INC35 citations92
US6824343B2Nov 30, 2004
Substrate support
APPLIED MATERIALS INC20 citations92
US7611217B2Nov 3, 2009
Methods and systems for inkjet drop positioning
APPLIED MATERIALS INC23 citations91
US7129694B2Oct 31, 2006
Large substrate test system
APPLIED MATERIALS INC21 citations91
US7556334B2Jul 7, 2009
Methods and apparatus for aligning print heads
APPLIED MATERIALS INC15 citations90
US7319335B2Jan 15, 2008
Configurable prober for TFT LCD array testing
APPLIED MATERIALS INC38 citations90
US7104535B2Sep 12, 2006
Methods and apparatus for positioning a substrate relative to a support stage
APPLIED MATERIALS INC22 citations86
US10262837B2Apr 16, 2019
Plasma uniformity control by gas diffuser hole design
APPLIED MATERIALS INC5 citations84
US7735710B2Jun 15, 2010
Substrate support
APPLIED MATERIALS INC10 citations84
US7641434B2Jan 5, 2010
Dual substrate loadlock process equipment
APPLIED MATERIALS INC11 citations84
US7499767B2Mar 3, 2009
Methods and apparatus for positioning a substrate relative to a support stage
APPLIED MATERIALS INC10 citations84
US7822324B2Oct 26, 2010
Load lock chamber with heater in tube
APPLIED MATERIALS INC10 citations83
US7469715B2Dec 30, 2008
Chamber isolation valve RF grounding
APPLIED MATERIALS INC12 citations83
US7355418B2Apr 8, 2008
Configurable prober for TFT LCD array test
APPLIED MATERIALS INC14 citations83
US9677177B2Jun 13, 2017
Substrate support with quadrants
APPLIED MATERIALS INC6 citations82
KURITA SHINICHI
5 patentsUS8616820B2Dec 31, 2013
Double dual slot load lock chamber
KURITA SHINICHI15 citations92
US8272830B2Sep 25, 2012
Scissor lift transfer robot
KURITA SHINICHI15 citations84
US8216422B2Jul 10, 2012
Substrate support bushing
KURITA SHINICHI6 citations83
US8061949B2Nov 22, 2011
Multiple slot load lock chamber and method of operation
KURITA SHINICHI11 citations83
US9922854B2Mar 20, 2018
Vertical inline CVD system
KURITA SHINICHI7 citations82
APPLIED KOMATSU TECHNOLOGY INC
4 patentsUS6517303B1Feb 11, 2003
Substrate transfer shuttle
APPLIED KOMATSU TECHNOLOGY INC79 citations98
US6235634B1May 22, 2001
Modular substrate processing system
APPLIED KOMATSU TECHNOLOGY INC420 citations98
US6213704B1Apr 10, 2001
Method and apparatus for substrate transfer and processing
APPLIED KOMATSU TECHNOLOGY INC144 citations98
US6176668B1Jan 23, 2001
In-situ substrate transfer shuttle
APPLIED KOMATSU TECHNOLOGY INC95 citations98
CHOI SOO YOUNG
3 patentsNIKON CORP
2 patentsHITACHI LTD
2 patentsWHITE JOHN M
1 patentTINER ROBIN L
1 patentINAGAWA MAKOTO
1 patentBEHDJAT MEHRAN
1 patentHITACHI POWER SEMICONDUCTOR DEVICE LTD
1 patentShowing the top 50 of 133 patents by PatentIndex Score.