Inventor
KATO CHIE
JP7 patents
⚠️ This page may combine multiple inventors who share the name “KATO CHIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS7811939B2Oct 12, 2010
Plasma etching method
TOKYO ELECTRON LTD12 citations82
US8383517B2Feb 26, 2013
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD2 citations62
US8034720B2Oct 11, 2011
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD1 citations51