Inventor
NAGAI MIZUKI
JP39 patents
⚠️ This page may combine multiple inventors who share the name “NAGAI MIZUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
37 patentsUS6709563B2Mar 23, 2004
Copper-plating liquid, plating method and plating apparatus
EBARA CORP68 citations95
US6517894B1Feb 11, 2003
Method for plating a first layer on a substrate and a second layer on the first layer
EBARA CORP49 citations95
US6638411B1Oct 28, 2003
Method and apparatus for plating substrate with copper
EBARA CORP46 citations92
US6365017B1Apr 2, 2002
Substrate plating device
EBARA CORP31 citations92
US7736474B2Jun 15, 2010
Plating apparatus and plating method
EBARA CORP8 citations82
US10633757B2Apr 28, 2020
Plating apparatus, plating method, and recording medium
EBARA CORP3 citations73
US7033463B1Apr 25, 2006
Substrate plating method and apparatus
EBARA CORP10 citations73
US6793794B2Sep 21, 2004
Substrate plating apparatus and method
EBARA CORP7 citations73
US6908534B2Jun 21, 2005
Substrate plating method and apparatus
EBARA CORP7 citations72
US12221714B2Feb 11, 2025
Plating method and plating apparatus
EBARA CORP0 citations62
US11542629B2Jan 3, 2023
Method of plating, apparatus for plating, and non-volatile storage medium that stores program
EBARA CORP0 citations62
US11286577B2Mar 29, 2022
Plating method and plating apparatus
EBARA CORP0 citations62
US11037791B2Jun 15, 2021
Substrate holder, a method for holding a substrate with a substrate holder, and a plating apparatus
EBARA CORP0 citations62
US12157951B2Dec 3, 2024
Plating method, insoluble anode for plating, and plating apparatus
EBARA CORP0 citations61
US11566339B2Jan 31, 2023
Plating method and plating apparatus
EBARA CORP0 citations61
US11319642B2May 3, 2022
Method for determining location of power feeding point in electroplating apparatus and electroplating apparatus for plating rectangular substrate
EBARA CORP0 citations61
US10941504B2Mar 9, 2021
Plating method and plating apparatus
EBARA CORP0 citations61
US10934630B2Mar 2, 2021
Method for determining location of power feeding point in electroplating apparatus and electroplating apparatus for plating rectangular substrate
EBARA CORP0 citations61
US7479213B2Jan 20, 2009
Plating method and plating apparatus
EBARA CORP4 citations61
US12410535B2Sep 9, 2025
Anode holder, and plating apparatus
EBARA CORP0 citations60
US7553400B2Jun 30, 2009
Plating apparatus and plating method
EBARA CORP6 citations60
US12020954B2Jun 25, 2024
Substrate processing apparatus
EBARA CORP0 citations59
US11725297B2Aug 15, 2023
Plating apparatus
EBARA CORP0 citations59
US11686009B2Jun 27, 2023
Regulation plate, anode holder, and substrate holder
EBARA CORP0 citations59
US11268207B2Mar 8, 2022
Regulation plate, anode holder, and substrate holder
EBARA CORP0 citations59
US11066755B2Jul 20, 2021
Plating apparatus and plating method
EBARA CORP0 citations59
US10487415B2Nov 26, 2019
Method of adjusting plating apparatus, and measuring apparatus
EBARA CORP0 citations52
US10115598B2Oct 30, 2018
Substrate holder, a method for holding a substrate with a substrate holder, and a plating apparatus
EBARA CORP0 citations52
US10100424B2Oct 16, 2018
Method of adjusting plating apparatus, and measuring apparatus
EBARA CORP1 citations52
US10676838B2Jun 9, 2020
Plating device, plating method, substrate holder, resistance measuring module, and substrate holder testing method
EBARA CORP0 citations51
US10648099B2May 12, 2020
Plating method and plating apparatus
EBARA CORP0 citations51
US7311809B2Dec 25, 2007
Plating apparatus for substrate
EBARA CORP1 citations51
US12516437B2Jan 6, 2026
Method of plating and apparatus for plating
EBARA CORP0 citations50
US11492721B2Nov 8, 2022
Electroplating apparatus and cleaning method in electroplating apparatus
EBARA CORP0 citations50
US10294580B2May 21, 2019
Plating method and plating apparatus
EBARA CORP0 citations50
US11280020B2Mar 22, 2022
Substrate holder and plating device
EBARA CORP0 citations49
US10047454B2Aug 14, 2018
Plating apparatus and plating method
EBARA CORP0 citations42