Inventor
CHIBANA TAKAHITO
JP7 patents
Patents
7 patentsUS7057701B2Jun 6, 2006
Exposure apparatus
CANON KK15 citations81
US7218377B2May 15, 2007
Exposure apparatus and device manufacturing method
CANON KK5 citations70
US11921304B2Mar 5, 2024
Polygon mirror, deflection device, optical scanning apparatus and image forming apparatus
CANON KK0 citations60
US7742147B2Jun 22, 2010
Exposure apparatus
CANON KK2 citations59
US7538852B2May 26, 2009
Exposure apparatus and device manufacturing method
CANON KK2 citations59
US12515460B2Jan 6, 2026
Polygon mirror
CANON KK0 citations56
US9454087B2Sep 27, 2016
Exposure apparatus and device fabrication method
CANON KK0 citations40