Inventor
YEH LUN-WEN
TW6 patents
⚠️ This page may combine multiple inventors who share the name “YEH LUN-WEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS9870443B2Jan 16, 2018
Method and apparatus for integrated circuit mask patterning
TAIWAN SEMICONDUCTOR MFG CO LTD26 citations93
US10990744B2Apr 27, 2021
Method and apparatus for integrated circuit mask patterning
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11748549B2Sep 5, 2023
Method and apparatus for integrated circuit mask patterning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61