Inventor

YOKOYAMA HIBIKI

JP3 patents

Patents

3 patents

US12247296B2Mar 11, 2025

Member for plasma processing device

NHK SPRING CO LTD1 citations55

US12354901B2Jul 8, 2025

Stage and manufacturing method thereof

NHK SPRING CO LTD0 citations54

US12598949B2Apr 7, 2026

Stage and method of manufacturing stage

NHK SPRING CO LTD0 citations45