Inventor
SUYAMA MAKOTO
JP16 patents
⚠️ This page may combine multiple inventors who share the name “SUYAMA MAKOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
9 patentsUS8728946B1May 20, 2014
Plasma etching method
HITACHI HIGH TECH CORP5 citations84
US9269892B2Feb 23, 2016
Plasma etching method
HITACHI HIGH TECH CORP3 citations71
US9378758B2Jun 28, 2016
Plasma etching method
HITACHI HIGH TECH CORP0 citations52
US9017564B2Apr 28, 2015
Plasma etching method
HITACHI HIGH TECH CORP0 citations52
US9680090B2Jun 13, 2017
Plasma etching method
HITACHI HIGH TECH CORP0 citations51
US9506154B2Nov 29, 2016
Plasma processing method
HITACHI HIGH TECH CORP0 citations50
US9449842B2Sep 20, 2016
Plasma etching method
HITACHI HIGH TECH CORP0 citations50
US9281470B2Mar 8, 2016
Plasma processing method
HITACHI HIGH TECH CORP0 citations50
US9972776B2May 15, 2018
Plasma processing method
HITACHI HIGH TECH CORP0 citations42
DAIKIN IND LTD
4 patentsUS6068788AMay 30, 2000
Wafer-cleaning solution and process for the production thereof
DAIKIN IND LTD25 citations91
US7404910B1Jul 29, 2008
Etching solution, etched article and method for etched article
DAIKIN IND LTD10 citations83
US7052627B1May 30, 2006
Etching solution, etched article and method for etched article
DAIKIN IND LTD16 citations83
US6159865ADec 12, 2000
Wafer treating solution and method for preparing the same
DAIKIN IND LTD12 citations72