Inventor
ISHIMARU MASATO
JP6 patents
Patents
6 patentsUS9269892B2Feb 23, 2016
Plasma etching method
HITACHI HIGH TECH CORP3 citations71
US9680090B2Jun 13, 2017
Plasma etching method
HITACHI HIGH TECH CORP0 citations51
US9506154B2Nov 29, 2016
Plasma processing method
HITACHI HIGH TECH CORP0 citations50
US9449842B2Sep 20, 2016
Plasma etching method
HITACHI HIGH TECH CORP0 citations50
US9281470B2Mar 8, 2016
Plasma processing method
HITACHI HIGH TECH CORP0 citations50
US9972776B2May 15, 2018
Plasma processing method
HITACHI HIGH TECH CORP0 citations42