Inventor

NAVARRO Y KOREN RAMON

NL3 patents

Patents

3 patents

US7332732B2Feb 19, 2008

Alignment systems and methods for lithographic systems

ASML NETHERLANDS BV22 citations94

US6844918B2Jan 18, 2005

Alignment system and methods for lithographic systems using at least two wavelengths

ASML NETHERLANDS BV54 citations94

US7259828B2Aug 21, 2007

Alignment system and method and device manufactured thereby

ASML NETHERLANDS BV25 citations86