Inventor

WU SHI-MIN

TW7 patents

Patents

7 patents

US11063157B1Jul 13, 2021

Trench capacitor profile to decrease substrate warpage

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83

US11769792B2Sep 26, 2023

Trench capacitor profile to decrease substrate warpage

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72

US9761658B2Sep 12, 2017

Shallow trench isolation structure with raised portion between active areas and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69

US12176387B2Dec 24, 2024

Trench capacitor profile to decrease substrate warpage

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11152462B2Oct 19, 2021

Semiconductor device having fins

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59

US12199139B2Jan 14, 2025

Trench capacitor film scheme to reduce substrate warpage

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50

US10367059B2Jul 30, 2019

Method of manufacturing a semiconductor structure having a buried raised portion

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48