Inventor
OGATA YOSHINAO
JP6 patents
Patents
6 patentsUS9586400B2Mar 7, 2017
Liquid discharge head, liquid discharge apparatus, and method of manufacturing liquid discharge head
CANON KK2 citations71
US9548207B2Jan 17, 2017
Method of etching a silicon substrate
CANON KK2 citations71
US9914295B2Mar 13, 2018
Method for manufacturing structure
CANON KK1 citations51
US9789689B2Oct 17, 2017
Method of forming through-substrate
CANON KK0 citations40
US9676193B2Jun 13, 2017
Substrate processing method and method of manufacturing substrate for liquid discharge head including forming hole in substrate by dry etching
CANON KK0 citations40
US9511588B2Dec 6, 2016
Method for processing silicon substrate
CANON KK0 citations40